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Tabletop Scanning Electron Microscope SH: Fast, Easy and Powerful Observation








Imagine a higher state of resolution
The Hirox SEM series is focused on two essentials: Powerful Performance and User-Friendly Operation. Using the table-top compact configuration, Mini-SEM provides high-resolution, high-magnification SEM images with the ease of use. Auto-Focus, Auto-Brightness and Auto-Contrast produce an excellent image every time.

No doubt about strong performance and flexible integration. 5-axis full stroke control and 4-hole variable aperture of SH-5000M help fine-resolution SEM image. Built-in multi detector (SE+BSE) of SH-4000M provides the ideal observation for each different type of specimen. All Mini-SEM series including SH-3500MB provide image observation condition within 2 minutes after sample loading. Optional EDS system and many other tools can be adapted for your application.


Tabletop SEM SH-3500MB

High magnification beyond the optical limit

  • Max. 30,000x Magnification
  • BSE Detector (Solid State Type)
  • 5kV to 30kV Variable Accelerating Voltage
  • Multi-Vacuum Mode - Standard / Charge Up Reduction
  • Image Observation Ready within 2 min.
  • 3-axis Strokes - X,Y,R
  • Options - EDS System, Cooling Stage

Non-conductive samples can be observed without coating, easy to use

  • Auto adjustment functions
  • System can be ready within 2 min after sample exchanged
  • Compact and flexible
  • Friendly GUI

High quality images

  • Image resolution up to 5Megapixels
  • Good depth of field
  • Multiple image formats compatible
  • On-screen measurement: Distance, Angle...etc.
 

Tabletop SEM SH-4000M

High magnification beyond the optical limit

  • Max. 60,000x Magnification
  • SE Detector & BSE Detector - Multi Mode
  • 5kV to 30kV Variable Accelerating Voltage
  • Multi-Vacuum Mode - Standard / Charge Up Reduction
  • Image Observation Ready within 2 min.
  • 3-axis Strokes - X,Y,R
  • Options - EDS System, Cooling Stage

Non-conductive samples can be observed without coating, easy to use

  • Auto adjustment functions
  • System can be ready within 2 min after sample exchanged
  • Compact and flexible
  • Friendly GUI

High quality images

  • Image resolution up to 5Megapixels
  • Good depth of field
  • Multiple image formats compatible
  • On-screen measurement: Distance, Angle...etc.
 

Tabletop SEM SH-5000M

High magnification beyond the optical limit

  • Max. 100,000x Magnification
  • SE Detector (Option - BSE Detector)
  • 5kV to 30kV Variable Accelerating Voltage
  • Multi-Vacuum Mode - Standard / Charge Up Reduction
  • Image Observation Ready within 2 min.
  • 5-axis Strokes - X,Y,R, Z, T
  • 4-Hole Variable Aperture (30/50/100/200µm)
  • Options - EDS System, Cooling Stage, Low Vacuum Control

Non-conductive samples can be observed without coating, easy to use

  • Auto adjustment functions
  • System can be ready within 2 min after sample exchanged
  • Compact and flexible
  • Friendly GUI

High quality images

  • Image resolution up to 5Megapixels
  • Good depth of field
  • Multiple image formats compatible
  • On-screen measurement: Distance, Angle...etc.
 


Options

Ion Sputter Coater - MCM-100

  • Quick and Easy Operation
  • Sample Loading Size: Max. 50mm
  • Target Material: Au (Gold)
  • Dimensions / Weight:
    180 (W) x 310 (D) x 310 (H) / 15kg

Cooling Stage

  • Compatible with the SEM-EDS interface
  • Moisture evaporation
  • Set temperature with control panel
  • Real time temperature display
  • Sample height adjustable
  • Remote control


EDS System

  • SDD Type - Nitrogen Free
  • Elemental Detection from Boron (5) to Americium (90)
  • Spectrum Resolution < 133 eV(MnKa)
  • Multi-point Analysis / Line Scan / Elemental Mapping

BSE Detector

  • 4-Channel Fixed Type (Solid-State)
  • Composition or Topographic Analysis
  • Excellent atomic number resolution 0.1Z at Z=30
  • Choice of Detectors for normal, low voltage, UVH



Applications

Life Science PCB/SMT Energy Textiles
Food Semiconductor Forensic Biology
Cosmetics Materials Science Military Enviroment
Geo. Prospect Mining Industry Petro & Chemical Archaeology
Healthcare Automotive Metallographic Failure Analysis


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